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Precision Ceramics
SiC
ZrO₂
Si₃N₄
BN
Al₂O₃
B₄C
AlN
Quartz
Graphite
Semiconductor Applications
Silicon carbide platen
RTP with a carrier plate
Cover plate
Boat
Focus ring
SiC Super K for RTP
CMP platen
DC Plug
Ceramic arm
SiC chuck
Nano-isolation solution
LED industry (lighting)
ICP carrier plate
PSS carrier plate
RTP carrier plate
MOCVD(STAR/DISC)
PVD carrier plate
SiC Super K for RTP
Bump carrier
Ceramic plate
SiC chuck
Ceramic arm
Solar process applications
Silicon Nitride Washer
SiC paddle (Paddle)
Tube
Boat
Ceramic arm
LCD industry
Bushing
Lift Pin
Isolation disc
SiC paddle (Paddle)
SiC Paddle
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