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Precision Ceramics
SiC
ZrO₂
Si₃N₄
BN
Al₂O₃
B₄C
AlN
Quartz
Graphite
Semiconductor Applications
Silicon carbide platen
RTP with a carrier plate
Cover plate
Boat
Focus ring
SiC Super K for RTP
CMP platen
DC Plug
Ceramic arm
SiC chuck
Nano-isolation solution
LED industry (lighting)
ICP carrier plate
PSS carrier plate
RTP carrier plate
MOCVD(STAR/DISC)
PVD carrier plate
SiC Super K for RTP
Bump carrier
Ceramic plate
SiC chuck
Ceramic arm
Solar process applications
Silicon Nitride Washer
SiC paddle (Paddle)
Tube
Boat
Ceramic arm
LCD industry
Bushing
Lift Pin
Isolation disc
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