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SiC star disc
SiC star disc
Detailed Description
Feature requirements
Why is Kallex better than others
1. Customized services
2. Stable quality and fast delivery
3. The flatness in the acupoint is good
4. Highly cost-performance ratio
Application
SiC center plate and discs are used in MOCVD reaction chamber for III-V compound
semiconductor epitaxial process.
Feature requirements
1. High temperature resistant
2. High thermal conductivity
3. No particle issue
4. Good thermal stability
2. High thermal conductivity
3. No particle issue
4. Good thermal stability
Why is Kallex better than others
1. Customized services
2. Stable quality and fast delivery
3. The flatness in the acupoint is good
4. Highly cost-performance ratio
5. Long lasting life