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SiC Super K for RTP
SiC Super K for RTP
Detailed Description
SiC Super K for RTP Application
The microstructure designed SiC《Super K》is the best material of carrier for carrying
wafers in the rapid thermal process (RTP) of photoelectronic and compound
semiconductors. There are empirical performances in successfully heating up to
1250 ˚C at a rate of 60˚C/sec.
SiC Super K for RTP Feature requirements
1.Superior thermal shock resistance
2.Low thermal expansion coefficient
3.Good thermal conductivity
4.Good temperature uniformity
Why is Kallex better than others
1.Diversify in various specifications, also providing customized services.
2.High quality and fast delivery.